Expert system of single magnetic lens using JESS in Focused Ion Beam
نویسندگان
چکیده
This work shows expert system of symmetrical single magnetic lens used in focused ion beam optical system. Java expert system shell(JESS) programming is proposed to build the intelligent agent "MOPTION"for getting an optimum magnetic flux density , and calculate the ion optical trajectory. The combination of such rule based engine and SIMION 8.1 has configured the reconstruction process and compiled the data retrieved by the proposed expert system agent to implement the pole-pieces reconstruction for lens design. The pole pieces reconstruction has been resulted in 3D graph , and under the infinite magnification conditions of the optical path, aberration (spherical / chromatic and total) disks diameters have been obtained and got the values (0.03,0.13 and 0.133) micron (μm) respectively.
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